IEC 62047-1 Ed. 1.0 b:2005 PDF

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Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
standard by International Electrotechnical Commission, 09/27/2005

Document Format: PDF

Description

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Product Details

Edition:
1.0
Published:
09/27/2005
Number of Pages:
49
File Size:
1 file , 690 KB
Note:
This product is unavailable in Ukraine, Russia, Belarus