DIN 50451-2 PDF

Testing of materials for semiconductor technology – Determination of trace elements in liquids – Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy
standard by Deutsches Institut Fur Normung E.V. (German National Standard), 04/01/2003