Description
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70??C.
Product Details
- Published:
- 07/01/2012
- Number of Pages:
- 8
- File Size:
- 1 file , 300 KB
- Note:
- This product is unavailable in Russia, Ukraine, Belarus
